o:14753
Polimidne konzole za primenu u mikro-elektro-mehaničkim (mems) sistemima
doktorska disertacija
Polyimide structures for micro-electro-mechanical system (mems) - based applications. : doctoral dissertation
sr
U okviru ove doktorske disertacije proučena je i eksperimentalno ispitana
mogućnost primene tankih polimernih filmova kao zamene za silicijum kod bimorfnih
MEMS struktura. Ponašanje deformabilnih bimorfnih MEMS struktura (oblik, položaj u
mirovanju i u stanju pobude) veoma zavisi od termomehaničkih karakteristika samih
strukturnih materijala, a koje samim tim imaju uticaja i na vreme odziva, efikasnost i
primenjenu snagu i/ili osetljivost. Prvi put su u radu ispitivane toplotne karakteristike
(koeficijent toplotnog širenja, , i temperatura prelaza u staklasto stanje, Tg) tankih
poliimidnih filmova (2 m - 10 m) u zavisnosti od debljine filma i procesnih
parametara (temperature umrežavanja, kao i temperaturnog profila koji je korišćen pri
umrežavanju polimera). Na osnovu eksperimentalnih podataka izvedene su korelacije
izmeĎu debljine filma i koeficijenta toplotnog širenja, , kao i temperature prelaza u
staklasto stanje, Tg. Pomoću toplotnih karakteristika PI filmova izvršena je simulacija,
funkcionalizacija i modelovanje nove generacije bimorfnih mikrosenzora i
mikropokretača tipa metal - poliimid i poliimid - poliimid...
This Ph.D. thesis studies and experimentally examines applicability of thin
polymer films as structural substitutes for crystaline Si in bimorph MEMS structures.
The two shapes (bi - morph) and transient state between the ON - OFF resting positions,
that such deformable MEMS structures assume, largely depend on thermo-mechanical
characteristics of the structural materials, influencing response time, efficiency and
delivered force and/or sensitivity. For the first time, thermal characteristics (e.g.
Coefficent of Thermal Expansion (CTE) and the Glass Transient Temperature Tg) of
trully thin (2m – 10m) polyimide (PI) films have been examined and the relationship
with respect to film thickness and film coating processing parameters (e.g. soft - baking
and hard-baking temperature profiles) has been established. The correlations between
the film thickness and respective CTEs - , as well as respective glass transition
temperatures, Tgs have been experimentally established. Experimentally established
thermo - mechanical characteristics of PI films were then used for software simulation,
functionalisation and modelling of the next generation of bimorph microsensors and
microactuators based on PI - metal and PI - PI architecture...
Hemija i hemijska tehnologija - Polimerno inženjerstvo / Chemistry and Chemical Technology - Polymer Engineering Datum odbrane: 26.09.2016.
Tanki polimerni filmovi, poliimid, mikro-elektro-mehanički sistemi (MEMS), bimorfne strukture
Thin polymer films, polyimide, micro-electro-mechanical systems (MEMS), bimorph structure
yes
48697871
91552101
4620
91552100
48697871
2017-02-22T14:54:56.053Z
45
no
46
mentor
Tatjana A.
Đakov
2016
63
mentor
Ivanka, 1959-
Popović
2016
63
mentor
Ljubinka, 1951-
Rajaković
2016
63
član komisije
Vesna, 1961-
Radojević
2016
63
član komisije
Melina, 1974-
Kalagasidis-Krušić
2016
63
član komisije
Vesna
Jović
2016
XV, 145 listova
3594782
http://phaidrabg.bg.ac.rs/o:14753
no
yes
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2017-02-22T14:54:56.320Z
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1067378
1067387
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1067197
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Tanki polimerni filmovi, poliimid, mikro-elektro-mehanički sistemi(MEMS), bimorfne strukture
Thin polymer films, polyimide, micro-electro-mechanical systems(MEMS), bimorph structure
1738
11A41
2016